2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2001 proceedings, 23-24 April 2001 Munich, Germany : soft

Author: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshopほか

Notes on use

Note (General)：: Includes bibliographical references"IEEE catalog number 01CH37160"--T.p. verso

Search by Bookstore

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
ISBN: 0780365550
Title: 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2001 proceedings, 23-24 April 2001 Munich, Germany
Volume: : soft
Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
https://ci.nii.ac.jp/author/DA05419489
Institute of Electrical and Electronics Engineers
https://ci.nii.ac.jp/author/DA00739948
Semiconductor Equipment and Materials International
https://ci.nii.ac.jp/author/DA0468648X
Publication, Distribution, etc.: IEEE Service Center
Publication Date: c2001
Publication Date (W3CDTF): 2001
Size: 28 cm
Alternative Title: 01CH37160
The 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference : ASMC 2001 : factory dynamics, process control, advanced process technology, yield modeling and analysis, defect detection and reduction, April 23-24, International Congress Centre, Munich, Germany
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Includes bibliographical references
"IEEE catalog number 01CH37160"--T.p. verso
Related Material (URI): https://ci.nii.ac.jp/ncid/BA53827366#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA53827366 : BA53827366