極浅半導体接合創成のためのコヒーレントフォノン励起型アニールプロセスの解明・制御

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Material Type: 図書
Title: 極浅半導体接合創成のためのコヒーレントフォノン励起型アニールプロセスの解明・制御
Title Transcription: キョクセンハンドウタイセツゴウソウセイノタメノコヒーレントフォノンレイキガタアニールプロセスノカイメイセイギョ
Author/Editor: 研究代表者節原裕一
Author Heading: 節原, 裕一セツハラ, ユウイチ
Publication, Distribution, etc.: [節原裕一]
Publication Date: 2006.5
Publication Date (W3CDTF): 2006
Size: 30cm
Alternative Title: 平成15年度〜平成17年度科学研究費補助金(基盤研究(B))研究成果報告書
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 課題番号: 15360388
Related Material (URI): https://ci.nii.ac.jp/ncid/BA82863250#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA82863250 : BA82863250