Plasma processing XIV : proceedings of the international symposium

Material type: 図書

Author: editor, G.S. Mathad ; assistant editors, M.D. Allendorf, R.E. Sah, M. Yang ; sponsoring divisions, Dielectric Science and Technology and Electronics

Publisher: Electrochemical Society

Publication date: c2002

Material Format: Paper

Capacity, size, etc.: 24 cm

NDC: -

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Note (General)：: Includes bibliographical references and indexes"The symposium, cosponsored by the Dielectric Science & Technology and Electronics divisions, was held ...

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Paper

Material Type: 図書
ISBN: 1566773415
Title: Plasma processing XIV : proceedings of the international symposium
Author/Editor: editor, G.S. Mathad ; assistant editors, M.D. Allendorf, R.E. Sah, M. Yang ; sponsoring divisions, Dielectric Science and Technology and Electronics
Author Heading: International Symposium on Plasma Processing
Mathad, G. S.
https://ci.nii.ac.jp/author/DA03249537
Allendorf, Mark Donald
https://ci.nii.ac.jp/author/DA13712004
Sah, R. E.
Yang, M.
Electrochemical Society. Dielectric Science and Technology Division
https://ci.nii.ac.jp/author/DA06421624
Electrochemical Society. Electronics Division
https://ci.nii.ac.jp/author/DA0357072X
Publication, Distribution, etc.: Electrochemical Society
Publication Date: c2002
Publication Date (W3CDTF): 2002
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Includes bibliographical references and indexes
"The symposium, cosponsored by the Dielectric Science & Technology and Electronics divisions, was held as part of the 201st Centennial Meeting of The Electrochemical Society, Inc., in Philadelphia, PA, May 12-17, 2002"--on pref
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Related Material (URI): https://ci.nii.ac.jp/ncid/BA60593447#entity
https://lccn.loc.gov/2002112473
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA60593447 : BA60593447
LC Control Number: 2002112473
https://lccn.loc.gov/2002112473