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図書

Materials for microlithography : radiation-sensitive polymers

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Materials for microlithography : radiation-sensitive polymers

Material type
図書
Author
L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984
Publisher
The Society
Publication date
1984
Material Format
Paper
Capacity, size, etc.
24 cm
NDC
-
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Paper

Material Type
図書
ISBN
0841208719
Author/Editor
L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984
Publication, Distribution, etc.
Publication Date
1984
Publication Date (W3CDTF)
1984
Size
24 cm
Alternative Title
Radiation-sensitive polymers