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図書

単結晶SiCナノ構造薄膜層がナノサーフェスインテグリティーに及ぼす影響

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単結晶SiCナノ構造薄膜層がナノサーフェスインテグリティーに及ぼす影響

Material type
図書
Author
古川勇二研究代表者
Publisher
古川勇二
Publication date
2007.3
Material Format
Paper
Capacity, size, etc.
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NDC
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[課題番号] : 16206015

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Paper

Material Type
図書
Title Transcription
タンケッショウ SiC ナノコウゾウ ハクマクソウ ガ ナノサーフェスインテグリティー ニ オヨボス エイキョウ
Author/Editor
古川勇二研究代表者
Author Heading
古川, 勇二 フルカワ, ユウジ
Publication, Distribution, etc.
Publication Date
2007.3
Publication Date (W3CDTF)
2007
Alternative Title
科学研究費補助金(基盤研究(A))研究成果報告書 : 平成16年度〜平成18年度
Place of Publication (Country Code)
ja