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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 0892521279
- Title
- Author/Editor
- James W. Giffin, Bruce Ruff, editors ; presented by the Society of Photo-optical Instrumentation Engineers and the Northern California Microphotomask/Masking Working Group, in cooperation with the International Society for Hybrid Microelectronics
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- c1977
- Publication Date (W3CDTF)
- 1977
- Size
- 28 cm
- Place of Publication (Country Code)
- us