Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies IX : 7-8 March 1990, San Jose, California

Author: Douglas J. Resnick, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

Notes on use

Note (General)：: Proceedings of the SPIE Symposium on MicrolithographyIncludes bibliographical references

Related materials as well as pre- and post-revision versions

Search by Bookstore

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
ISBN: 0819403105
Title: Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies IX : 7-8 March 1990, San Jose, California
Author/Editor: Douglas J. Resnick, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Author Heading: Resnick, Douglas J.
https://ci.nii.ac.jp/author/DA09619220
Society of Photo-optical Instrumentation Engineers
https://ci.nii.ac.jp/author/DA00848546
Publication, Distribution, etc.: SPIE
Publication Date: c1990
Publication Date (W3CDTF): 1990
Size: 28 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Proceedings of the SPIE Symposium on Microlithography
Includes bibliographical references
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269217551104
Related Material (URI): https://ci.nii.ac.jp/ncid/BA26792870#entity
https://lccn.loc.gov/90060893
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269217551104
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA26792870 : BA26792870
LC Control Number: 90060893
https://lccn.loc.gov/90060893