半導体リソグラフィ技術第4刷

半導体リソグラフィ技術

第4刷

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Material Type: 図書
ISBN: 4782856237
Title: 半導体リソグラフィ技術
Title Transcription: ハンドウタイリソグラフィギジュツ
Author/Editor: 鳳紘一郎編著
Edition: 第4刷
Author Heading: 鳳, 紘一郎ホウ, コウイチロウ
https://ci.nii.ac.jp/author/DA00680798
Publication, Distribution, etc.: 産業図書
Publication Date: 1990.6
Publication Date (W3CDTF): 1990
Size: 22 cm
Place of Publication (Country Code): ja
Text Language Code: ja
Subject Heading: 集積回路
NDC 8th ed.: 549.7
NDLC: ND386
Target Audience: 一般
Note (General): 文献に「昭和63年追記」有
各章末:文献
Related Material: 集積回路プロセス技術シリーズ
https://cir.nii.ac.jp/crid/1130000797921197056
Related Material (URI): https://ci.nii.ac.jp/ncid/BN1286319X#entity
Periodical Title: 集積回路プロセス技術シリーズ
https://cir.nii.ac.jp/crid/1130000797921197056
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BN1286319X : BN1286319X