MEMS : design and fabrication : hardcover

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Note (General)：: The MEMS handbook, 2nd ed"A CRC Press book"--Back coverIncludes bibliographical references and index

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Material Type: 図書
ISBN: 0849391385
Title: MEMS : design and fabrication
Volume: : hardcover
Author/Editor: edited by Mohamed Gad-el-Hak
Author Heading: Gad-el-Hak, Mohamed
Publication, Distribution, etc.: CRC, Taylor & Francis
Publication Date: 2006
Publication Date (W3CDTF): 2006
Size: 26 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Microelectromechanical systems -- Design and construction
Microfabrication
LCC: TK7875
Target Audience: 一般
Note (General): The MEMS handbook, 2nd ed
"A CRC Press book"--Back cover
Includes bibliographical references and index
Related Material: Mechanical engineering series
https://cir.nii.ac.jp/crid/1130282270183642880
Related Material (URI): https://ci.nii.ac.jp/ncid/BA75370377#entity
https://lccn.loc.gov/2005050109
Periodical Title: Mechanical engineering series
https://cir.nii.ac.jp/crid/1130282270183642880
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA75370377 : BA75370377
LC Control Number: 2005050109
https://lccn.loc.gov/2005050109