図書

光・プラズマ2重励起による半導体SiCの低温エピタキシャル成長

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光・プラズマ2重励起による半導体SiCの低温エピタキシャル成長

Material type
図書
Author
研究代表者西野茂弘
Publisher
[西野茂弘]
Publication date
1991
Material Format
Paper
Capacity, size, etc.
26cm
NDC
428.85
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Paper

Material Type
図書
Title Transcription
ヒカリ プラズマ 2ジュウ レイキ ニ ヨル ハンドウタイ SiC ノ テイオン エピタキシャル セイチョウ
Author/Editor
研究代表者西野茂弘
Publication, Distribution, etc.
Publication Date
1991
Publication Date (W3CDTF)
1991
Size
26cm
Alternative Title
平成2年度科学研究費補助金(一般研究(C))研究成果報告書(課題番号01550016)