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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- ヒカリ プラズマ 2ジュウ レイキ ニ ヨル ハンドウタイ SiC ノ テイオン エピタキシャル セイチョウ
- Author/Editor
- 研究代表者西野茂弘
- Author Heading
- 西野, 茂弘 ニシノ, シゲヒロ
- Publication, Distribution, etc.
- Publication Date
- 1991
- Publication Date (W3CDTF)
- 1991
- Size
- 26cm
- Alternative Title
- 平成2年度科学研究費補助金(一般研究(C))研究成果報告書(課題番号01550016)