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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- イヨウ テイドリフトモノリシック ヨウリョウケイ アツリョク センサ ノ カイハツ
- Author/Editor
- 研究代表者 松尾正之
- Author Heading
- 松尾, 正之 マツオ, タダユキ
- Publication, Distribution, etc.
- Publication Date
- 1987.3
- Publication Date (W3CDTF)
- 1987
- Size
- 26cm
- Alternative Title
- 昭和61年度科学研究費補助金(試験研究2)研究成果報告書(課題番号 60850075)試験研究(2) 60850075 医用低ドリフトモノリシック容量形圧力センサの開発