Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.

Material type: 図書

Author: editors, Ting Y. Tsui ... [et al.]

Publisher: Materials Research Society

Publication date: c2006

Material Format: Paper

Capacity, size, etc.: 24 cm

NDC: -

View All

Notes on use

Note (General)：: "... Symposium F, "Materials, Technology and Reliability of Low-k Dielectrics and Cooper Interconnects," held April 18-21 at the 2006 MRS Spring Meeti...

Related materials as well as pre- and post-revision versions

Materials Research Society symposium proceedings

Search by Bookstore

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

List of Cooperating Institutions and Databases

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 図書
Title: Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.
Author/Editor: editors, Ting Y. Tsui ... [et al.]
Author Heading: Materials, Technology and Reliability of Low-k Dielectrics and Cooper Interconnects
Tsui, Ting Y.
Publication, Distribution, etc.: Materials Research Society
Publication Date: c2006
Publication Date (W3CDTF): 2006
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Semiconductors -- Materials -- Congresses
Semiconductors -- Junctions -- Congresses
Dielectric films -- Congresses
Integrated circuits -- Materials -- Congresses
Integrated circuits -- Reliability -- Congresses
Target Audience: 一般
Note (General): "... Symposium F, "Materials, Technology and Reliability of Low-k Dielectrics and Cooper Interconnects," held April 18-21 at the 2006 MRS Spring Meeting in San Francisco, California ..."--Pref
Includes bibliographical references and indexes
Related Material: Materials Research Society symposium proceedings
https://cir.nii.ac.jp/crid/1130282268858574848
Related Material (URI): https://ci.nii.ac.jp/ncid/BA78618898#entity
Periodical Title: Materials Research Society symposium proceedings
https://cir.nii.ac.jp/crid/1130282268858574848
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA78618898 : BA78618898