Advanced laser applications for new process technologies and diagnostics of reactive plasmas

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Note (General)：: Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2011Kind of academic degree: 博士(工学)Date degree granted: 2011-03-25...

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Material Type: 図書
Title: Advanced laser applications for new process technologies and diagnostics of reactive plasmas
Author/Editor: Tsuyoshi Yamaguchi
Author Heading: 山口, 剛ヤマグチ, ツヨシ
Publication, Distribution, etc.: [s.n.]
Publication Date: [2011]
Publication Date (W3CDTF): 2011
Size: 30 cm
Alternative Title: 反応性プラズマの新プロセス技術と気相診断のための先進レーザ応用
Text Language Code: en
Target Audience: 一般
Note (General): Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2011
Kind of academic degree: 博士(工学)
Date degree granted: 2011-03-25
Report number: 甲第9220号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB12281768#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB12281768 : BB12281768