Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.

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Note (General)：: Other editors: C. Fred Higgs III, Chad S. Korach, Subramanian BalakumarIncludes bibliographical references and indexes"..., 'Science and technology of...

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Material Type: 図書
ISBN: 9781605111308
Title: Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.
Author/Editor: editors: Ashok Kumar ... [et al.]
Author Heading: Kumar, Ashok
Higgs, C. Fred, III
Korach, Chad S.
Balakumar, Subramanian
Materials Research Society. Spring Meeting
https://ci.nii.ac.jp/author/DA02961732
Publication, Distribution, etc.: Materials Research Society
Publication Date: c2010
Publication Date (W3CDTF): 2010
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Other editors: C. Fred Higgs III, Chad S. Korach, Subramanian Balakumar
Includes bibliographical references and indexes
"..., 'Science and technology of chemical mechanical planarization (CMP),' held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California."--Pref.
Related Material: Materials Research Society symposium proceedings
https://cir.nii.ac.jp/crid/1130282268858574848
Related Material (URI): https://ci.nii.ac.jp/ncid/BB0223199X#entity
Periodical Title: Materials Research Society symposium proceedings
https://cir.nii.ac.jp/crid/1130282268858574848
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB0223199X : BB0223199X