極限微細集積回路作製のための原子層成長制御CVD装置の開発研究

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Material Type: 図書
Title: 極限微細集積回路作製のための原子層成長制御CVD装置の開発研究
Title Transcription: キョクゲンビサイシュウセキカイロサクセイノタメノゲンシソウセイチョウセイギョ CVD ソウチノカイハツケンキュウ
Author/Editor: 研究代表者室田淳一
Author Heading: 室田, 淳一ムロタ, ジュンイチ
Publication, Distribution, etc.: [室田淳一]
Publication Date: 1995.3
Publication Date (W3CDTF): 1995
Size: 30cm
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 課題番号: 04555064
平成4年度～平成6年度科学研究費補助金(試験研究(B)(1))研究成果報告書
Related Material: 科学研究費補助金(試験研究(B)(1))研究成果報告書
https://cir.nii.ac.jp/crid/1130000795384198144
Related Material (URI): https://ci.nii.ac.jp/ncid/BB12779860#entity
Periodical Title: 科学研究費補助金(試験研究(B)(1))研究成果報告書
https://cir.nii.ac.jp/crid/1130000795384198144
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB12779860 : BB12779860