RTP 2003, 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC

Material type: 図書

Author: editors, J. Gelpey ... [et al.] ; [sponsored by] IEEE EDS

Publisher: IEEE

Publication date: c2003

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Note (General)：: "IEEE Catalog Number: 03EX696"--T.p. versoIncludes bibliographical referencesAlso available via the World Wide Web with additional title: Advanced The...

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Paper

Material Type: 図書
ISBN: 0780378741
Title: RTP 2003, 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC
Author/Editor: editors, J. Gelpey ... [et al.] ; [sponsored by] IEEE EDS
Author Heading: International Conference on Advanced Thermal Processing of Semiconductors
Gelpey, Jeffrey C.
IEEE Electron Devices Society
https://ci.nii.ac.jp/author/DA01257512
Publication, Distribution, etc.: IEEE
Publication Date: c2003
Publication Date (W3CDTF): 2003
Size: 28 cm
Alternative Title: Advanced thermal processing of semiconductors
Advanced Thermal Processing of Semiconductors, 2003, RTP 2003, 11th IEEE International Conference on
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Semiconductors -- Heat treatment -- Congresses
Rapid thermal processing -- Congresses
Semiconductor doping -- Congresses
Semiconductors -- Defects -- Congresses
LCC: TK7871.85
Target Audience: 一般
Note (General): "IEEE Catalog Number: 03EX696"--T.p. verso
Includes bibliographical references
Also available via the World Wide Web with additional title: Advanced Thermal Processing of Semiconductors, 2003, RTP 2003, 11th IEEE International Conference on
HTTP:URL=http://ieeexplore.ieee.org/servlet/opac?punumber=8835 Pub. note=Restricted to IEEE Xplore subscribers
Related Material (URI): https://ci.nii.ac.jp/ncid/BA77323491#entity
https://lccn.loc.gov/2003103049
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA77323491 : BA77323491
LC Control Number: 2003103049
https://lccn.loc.gov/2003103049