Microprocesses and nanotechnology 2003 : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers pbk.

Material type: 図書

Author: sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.]

Publisher: Business Center for Academic Societies Japan

Publication date: c2003

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Notes on use

Note (General)：: "JSAP CAT. No. JSAP031240 ; IEEE Catalog No. 03EX738"--T.p. versoIncludes bibliographical references and author index

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Paper

Material Type: 図書
ISBN: 4891140402
Title: Microprocesses and nanotechnology 2003 : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers
Volume: pbk.
Author/Editor: sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.]
Author Heading: International Microprocesses and Nanotechnology Conference
https://ci.nii.ac.jp/author/DA19093801
IEEE Electron Devices Society
https://ci.nii.ac.jp/author/DA01257512
応用物理学会オウヨウブツリガッカイ
https://ci.nii.ac.jp/author/DA00633233
American Vacuum Society
https://ci.nii.ac.jp/author/DA03926125
Publication, Distribution, etc.: Business Center for Academic Societies Japan
Publication Date: c2003
Publication Date (W3CDTF): 2003
Size: 28 cm
Alternative Title: Microprocesses and nanotechnology 2003
Place of Publication (Country Code): ja
Text Language Code: en
Subject Heading: Microlithography -- Congresses
Nanotechnology -- Congresses
Microelectronics -- Congresses
Microfabrication -- Congresses
LCC: TK7874
Target Audience: 一般
Note (General): "JSAP CAT. No. JSAP031240 ; IEEE Catalog No. 03EX738"--T.p. verso
Includes bibliographical references and author index
Related Material (URI): https://ci.nii.ac.jp/ncid/BA77494803#entity
https://lccn.loc.gov/2004299804
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA77494803 : BA77494803
LC Control Number: 2004299804
https://lccn.loc.gov/2004299804