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CiNii Research
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Bibliographic Record
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- Material Type
- 図書
- Author/Editor
- organisé par la Société française du vide, Paris, France, avec le concours de la Direction des industries électroniques et de l'informatique du Ministère du redéploiement industriel et du commerce extérieur
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- [1985]
- Publication Date (W3CDTF)
- 1985
- Size
- 25 cm
- Alternative Title
- Comptes-rendus des travaux du 5e Colloque international sur les plasmas et la pulvérisation cathodique
- Place of Publication (Country Code)
- fr