CVD法によるAINエピタキシャル成長膜及びその応用デバイスに関する研究

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Material Type: 図書
Title: CVD法によるAINエピタキシャル成長膜及びその応用デバイスに関する研究
Title Transcription: CVD ホウニヨル AIN エピタキシャルセイチョウマクオヨビソノオウヨウデバイスニカンスルケンキュウ
Author/Editor: 坪内和夫研究代表者
Author Heading: 坪内, 和夫ツボウチ, カズオ
https://ci.nii.ac.jp/author/DA17259324
Publication, Distribution, etc.: [坪内和夫]
Publication Date: 1982.3
Publication Date (W3CDTF): 1982
Size: 26cm
Alternative Title: 昭和56年度科学研究費補助金(試験研究(2))研究成果報告書 : 課題番号00585097
Place of Publication (Country Code): ja
Target Audience: 一般
Related Material: 科学研究費補助金(試験研究2)研究成果報告書
https://cir.nii.ac.jp/crid/1130282271170357632
Related Material (URI): https://ci.nii.ac.jp/ncid/BD02875953#entity
Periodical Title: 科学研究費補助金(試験研究2)研究成果報告書
https://cir.nii.ac.jp/crid/1130282271170357632
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BD02875953 : BD02875953