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CiNii Research
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Author/Editor
- Qinghuang Lin, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- c2007
- Publication Date (W3CDTF)
- 2007
- Size
- 28 cm
- Alternative Title
- Advances in resist materials and processing technology 24Advances in resist materials and processing technology twenty-four
- Place of Publication (Country Code)
- us