次世代の要求に応える環境にやさしいコリン洗浄技術 : Eco-friendly choline-based cleaning technology as for forecast semiconductor process

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Material Type: 図書
Title: 次世代の要求に応える環境にやさしいコリン洗浄技術 : Eco-friendly choline-based cleaning technology as for forecast semiconductor process
Title Transcription: ジセダイノヨウキュウニコタエルカンキョウニヤサシイコリンセンジョウギジュツ
Author/Editor: 加藤千晴編
Author Heading: 加藤, 千晴
村岡, 久志
浅野, 雅文
太田, 好郎
富田, 寛
Publication, Distribution, etc.: 杜陵印刷
Publication Date: 2022.1
Publication Date (W3CDTF): 2022
Size: 21cm
Alternative Title: 環境にやさしいコリン洗浄技術
Place of Publication (Country Code): ja
Text Language Code: ja
Target Audience: 一般
Note (General): 監修: 村岡久志
Related Material (URI): https://ci.nii.ac.jp/ncid/BC16006762#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BC16006762 : BC16006762