Effects of VUV/UV radiation and oxygen radicals on low-temperature sterilization in surface-wave excited O2 plasma
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- Material Type
- 記事
- Author Heading
- Publication Date
- 2010-04
- Publication Date (W3CDTF)
- 2010-04
- Periodical title
- Thin Solid Films
- No. or year of volume/issue
- 518 13
- Volume
- 518
- Issue
- 13
- Pages
- 3590-3594