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チャネリングイオン注入を用いたp型GaNの活性化評価

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チャネリングイオン注入を用いたp型GaNの活性化評価

Material type
記事
Author
須山 篤志ほか
Publisher
The Japan Society of Applied Physics
Publication date
2021-08-26
Material Format
Digital
Journal name
応用物理学会学術講演会講演予稿集 2021.2 0
Publication Page
p.2682-2682
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Digital

Material Type
記事
Publication Date
2021-08-26
Publication Date (W3CDTF)
2021-08-26
Periodical title
応用物理学会学術講演会講演予稿集
No. or year of volume/issue
2021.2 0
Volume
2021.2
Issue
0
Pages
2682-2682