記事

金属ナノ粒子の電界トラップを用いた配線修復における周波数依存性

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金属ナノ粒子の電界トラップを用いた配線修復における周波数依存性

Material type
記事
Author
細谷 航平ほか
Publisher
The Japan Society of Mechanical Engineers
Publication date
2017
Material Format
Digital
Journal name
日本機械学会関東支部総会講演会講演論文集 2017.23 0
Publication Page
p.1309-
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Digital

Material Type
記事
Publication Date
2017
Publication Date (W3CDTF)
2017
Periodical title
日本機械学会関東支部総会講演会講演論文集
No. or year of volume/issue
2017.23 0
Volume
2017.23
Issue
0
Pages
1309-