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Novel nitridation technique using atmospheric pressure plasma : formation mechanism of ultrathin silicon nitride film and the dielectric property
Novel nitridation technique using atmospheric pressure plasma : formation mechanism of ultrathin silicon nitride film and the dielectric property
Paper
博士論文
Ryoma Hayakawa [著]
[Ryoma Hayakawa]
2006
<UT51-2006-E684>
National Diet Library
Author Heading
早川, 竜馬
日本物理学会誌
日本物理学会誌
Paper
雑誌
雑誌タイトル
日本物理学会
[1946]-
<Z15-13>
National Diet Library
Other Libraries in Japan
Volumes of this title
表面科学
表面科学
Paper
雑誌
雑誌タイトル
日本表面科学会 編
日本表面科学会
1980-2017
<Z15-379>
National Diet Library
Other Libraries in Japan
Volumes of this title
PF news
PF news
Paper
雑誌
雑誌タイトル
Photon factory news編集委員会
1988-
<Z15-442>
National Diet Library
Other Libraries in Japan
Volumes of this title
Molecular electronics and bioelectronics
Molecular electronics and bioelectronics
Paper
雑誌
雑誌タイトル
応用物理学会有機分子・バイオエレクトロニクス分科会 編
応用物理学会有機分子・バイオエレクトロニクス分科会
[1990]-2020
<Z17-B150>
National Diet Library
Volumes of this title
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