Hidehiro Watanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical EngineeringSPIEc2007
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- Author Heading...hotomask Japan BACUS (Technical group) Society of Photo-optical Inst...
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology ... [et al.]SPIEc2006
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- Author Heading...einwerktechnik BACUS (Technical group) Society of Photo-optical Inst...
Hiraoki Morimoto, editor ; sponsored by Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Japan Society of Applied Physics ... [et al.]SPIEc1999
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- Author Heading...hotomask Japan BACUS (Technical group) Society of Photo-optical Inst...
sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technologySPIEc1994
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- Author HeadingBACUS (Technical group)
Gregory K. Hearn, editorSPIE Optical Engineering Pressc1994
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- Author HeadingHearn, Gregory K. BACUS (Technical group) Society of Photo-optical Inst...
Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical EngineeringSPIEc1999
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- Author Heading...gy SEMI-Europe BACUS (Technical Group) Society of Photo-optical Inst...
Naoaki Aizaki, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering ; supporting societies, the Japan Society of Applied Physics ... [et al.] ; published by SPIE--the International Society for Optical EngineeringSPIEc1997
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- Author Heading...hotomask Japan BACUS (Technical group) Ōyō Butsuri Gakkai Society of...
Hideo Yoshihara, chair/editor ; sponsored by Japan Chapter of SPIE ; cosponsored by BACUS, SPIE--the International Society for Optical EngineeringSPIEc1994
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- Author Heading... Japan Chapter BACUS (Technical group) Photomask Japan '94
sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technologySPIEc1993
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- Author Heading...and Management BACUS (Technical group) Society of Photo-optical Inst...
William L. Brodsky, Gilbert V. Sheldon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technologySPIEc1994
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- Author Heading...en, Gilbert V. BACUS (Technical group)
sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technologySPIEc1992
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- Author HeadingSymposium on Photomask Technology BACUS (Technical group)