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Adhesion of polysilicon microbeams in controlled humidity ambients SAND981034C DE98 005456

Adhesion of polysilicon microbeams in controlled humidity ambients SAND981034C DE98 005456
Microform規格・テクニカルリポート類
Boer, M. P, Clews, P. J, Smith, B. K, Michalske, T. A1998<LS-DE98/005456>
National Diet Library

Minimizing sulfur contamination and rinse water volume required following a sulfuric acid/hydrogen peroxide clean by performing a chemically basic rinse SAND-97-1844C DE97 007889 CONF-9708691

Minimizing sulfur contamination and rinse water volume required following a sulfuric acid/hydrogen peroxide clean by performing a chemically basic rinse SAND-97-1844C DE97 007889 CONF-9708691
Microform規格・テクニカルリポート類
Clews, P. J, Nelson, G. C, Resnick, P. J, Matlock, C. A, Adkins, C. L. J1997<LS-DE97/007889>
National Diet Library

Sulfuric acid/hydrogen peroxide rinsing study SAND-95-2589C DE96 002541 CONF-9510078

Sulfuric acid/hydrogen peroxide rinsing study SAND-95-2589C DE96 002541 CONF-9510078
Microform規格・テクニカルリポート類
Clews, P. J, Nelson, G. C, Matlock, C. A1995<LS-DE96/002541>
National Diet Library

Study of light point defect removal by SC-1 chemistries SAND-95-2380C DE96 002077 CONF-9510077

Study of light point defect removal by SC-1 chemistries SAND-95-2380C DE96 002077 CONF-9510077
Microform規格・テクニカルリポート類
Resnick, P. J, Adkins, C. L. J, Matlock, C. A, Kelly, M. J, Clews, P. J1995<LS-DE96/002077>
National Diet Library

Evaluation of the SC-1/megasonic clean for sub-0.15 micron particle removal SAND-94-1496C DE94 014282 CONF-94101341

Evaluation of the SC-1/megasonic clean for sub-0.15 micron particle removal SAND-94-1496C DE94 014282 CONF-94101341
Microform規格・テクニカルリポート類
Adkins, C. L. J, Resnick, P. J, Clews, P. J, Thomas, E. V, Korbe, N. C1994<LS-DE94/014282>
National Diet Library

SULFURIC ACID/HYDROGEN PEROXIDE RINSING STUDY (SAND ; SAND-95-2589C)

SULFURIC ACID/HYDROGEN PEROXIDE RINSING STUDY (SAND ; SAND-95-2589C)
Paper図書
CLEWS, P.J.// NELSON, G.C.// MATLOCK, C.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingCLEWS, P.J. NELSON, G.C. MATLOCK, C.A.

STUDY OF LIGHT POINT DEFECT REMOVAL BY SC-1 CHEMISTRIES (SAND ; SAND-95-2380C)

STUDY OF LIGHT POINT DEFECT REMOVAL BY SC-1 CHEMISTRIES (SAND ; SAND-95-2380C)
Paper図書
RESNICK, P.J.// ADKINS, C.L.J.// MATLOCK, C.A.// KELLY, M.J.// CLEWS, P.J.// KORBE, N.C. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingRESNICK, P.J. ADKINS, C.L.J. MATLOCK, C.A. KELLY, M.J. CLEWS, P.J. KORBE, N.C.

EVALUATION OF THE SC-1/MEGASONIC CLEAN FOR SUB-0.15 MICRON PARTICLE REMOVAL (SAND ; SAND-94-1496C)

EVALUATION OF THE SC-1/MEGASONIC CLEAN FOR SUB-0.15 MICRON PARTICLE REMOVAL (SAND ; SAND-94-1496C)
Paper図書
ADKINS, C.L.J.// RESNICK, P.J.// CLEWS, P.J.// THOMAS, E.V.// KORBE, N.C.// CANNADAY, S.T. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingADKINS, C.L.J. RESNICK, P.J. CLEWS, P.J. THOMAS, E.V. KORBE, N.C. CANN...

DESIGN OF EXPERIMENTS APPROACH TO AN OPTIMIZED SC-1/MEGASONIC CLEAN FOR SUB-0.15 MICRON PARTICLE REMOVAL (SAND ; SAND-93-1104C)

DESIGN OF EXPERIMENTS APPROACH TO AN OPTIMIZED SC-1/MEGASONIC CLEAN FOR SUB-0.15 MICRON PARTICLE REMOVAL (SAND ; SAND-93-1104C)
Paper図書
RESNICK, P.J.// ADKINS, C.L.J.// CLEWS, P.J.// THOMAS, E.V.// CANNADAY, S.T. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingRESNICK, P.J. ADKINS, C.L.J. CLEWS, P.J. THOMAS, E.V. CANNADAY, S.T.

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