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Simplified models of growth, defect formation, and thermal conductivity in diamond chemical vapor deposition SAND-96-0883 DE96 010374

Simplified models of growth, defect formation, and thermal conductivity in diamond chemical vapor deposition SAND-96-0883 DE96 010374
Microform規格・テクニカルリポート類
Coltrin, M. E, Dandy, D. S1996<LS-DE96/010374>
National Diet Library

Chemical kinetics models for semiconductor processing SAND971828C DE98 002574

Chemical kinetics models for semiconductor processing SAND971828C DE98 002574
Microform規格・テクニカルリポート類
Coltrin, M. E, Creighton, J. R, Meeks, E, Grcar, J. F, Houf, W. G1997<LS-DE98/002574>
National Diet Library

Models of transport, gas-phase and surface chemistry in diamond chemical vapor deposition SAND-95-0583C DE95 009861 CONF-9505184

Models of transport, gas-phase and surface chemistry in diamond chemical vapor deposition SAND-95-0583C DE95 009861 CONF-9505184
Microform規格・テクニカルリポート類
Dandy, D. S, Coltrin, M. E1995<LS-DE95/009861>
National Diet Library

SIMPLIFIED MODELS OF GROWTH, DEFECT FORMATION, AND THERMAL CONDUCTIVITY IN DIAMOND CHEMICAL VAPOR DEPOSITION (SAND ; SAND-96-0883)

SIMPLIFIED MODELS OF GROWTH, DEFECT FORMATION, AND THERMAL CONDUCTIVITY IN DIAMOND CHEMICAL VAPOR DEPOSITION (SAND ; SAND-96-0883)
Paper図書
COLTRIN, M.E.// DANDY, D.S. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingCOLTRIN, M.E. DANDY, D.S.

MODELS OF TRANSPORT, GAS-PHASE AND SURFACE CHEMISTRY IN DIAMOND CHEMICAL VAPOR DEPOSITION (SAND ; SAND-95-0583C)

MODELS OF TRANSPORT, GAS-PHASE AND SURFACE CHEMISTRY IN DIAMOND CHEMICAL VAPOR DEPOSITION (SAND ; SAND-95-0583C)
Paper図書
DANDY, D.S.// COLTRIN, M.E. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingDANDY, D.S. COLTRIN, M.E.

SURFTHERM: A PROGRAM TO ANALYZE THERMOCHEMICAL AND KINETIC DATA IN GAS-PHASE AND SURFACE CHEMICAL REACTION MECHANISMS (SAND ; SAND-94-0219)

SURFTHERM: A PROGRAM TO ANALYZE THERMOCHEMICAL AND KINETIC DATA IN GAS-PHASE AND SURFACE CHEMICAL REACTION MECHANISMS (SAND ; SAND-94-0219)
Paper図書
COLTRIN, M.E.// MOFFAT, H.K. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingCOLTRIN, M.E. MOFFAT, H.K.

HETEROGENEOUS REACTION MECHANISMS AND KINETICS RELEVANT TO THE CVD OF SEMICONDUCTOR MATERIALS (SAND ; SAND-94-0033)

HETEROGENEOUS REACTION MECHANISMS AND KINETICS RELEVANT TO THE CVD OF SEMICONDUCTOR MATERIALS (SAND ; SAND-94-0033)
Paper図書
CREIGHTON, J.R.// COLTRIN, M.E. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingCREIGHTON, J.R. COLTRIN, M.E.

GAS-PHASE SILICON ATOM DENSITIES IN THE CHEMICAL VAPOR DEPOSITION OF SILICON FROM SILANE (SAND ; SAND-93-1489C)

GAS-PHASE SILICON ATOM DENSITIES IN THE CHEMICAL VAPOR DEPOSITION OF SILICON FROM SILANE (SAND ; SAND-93-1489C)
Paper図書
COLTRIN, M.E.// BREILAND, W.G.// HO, P. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingCOLTRIN, M.E. BREILAND, W.G. HO, P.

MOLECULAR BEAM MASS SPECTROMETRY STUDIES OF THE CHEMICAL VAPOR DEPOSITION OF DIAMOND (SAND ; SAND-93-2678C)

MOLECULAR BEAM MASS SPECTROMETRY STUDIES OF THE CHEMICAL VAPOR DEPOSITION OF DIAMOND (SAND ; SAND-93-2678C)
Paper図書
HSU, WEN L.// MCMASTER, M.C.// COLTRIN, M.E.// DANDY, D.S. (SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingHSU, WEN L. MCMASTER, M.C. COLTRIN, M.E. DANDY, D.S.

SI ATOM DENSITY PROFILES IN A ROTATING DISK CVD REACTOR (SAND ; SAND-92-2215C)

SI ATOM DENSITY PROFILES IN A ROTATING DISK CVD REACTOR (SAND ; SAND-92-2215C)
Paper図書
HO, P.// BREILAND, W.G.// COLTRIN, M.E. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1992.
Other Libraries in Japan
  • Author HeadingHO, P. BREILAND, W.G. COLTRIN, M.E.

MODEL OF ELEMENTARY CHEMISTRY AND FLUID MECHANICS IN THE COMBUSTION OF HYDROGEN ON PLATINUM SURFACES (SAND ; SAND-93-8228)

MODEL OF ELEMENTARY CHEMISTRY AND FLUID MECHANICS IN THE COMBUSTION OF HYDROGEN ON PLATINUM SURFACES (SAND ; SAND-93-8228)
Paper図書
WARNATZ, J.// ALLENDORF, M.D.// KEE, R.J.// COLTRIN, M.E. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
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  • Author HeadingWARNATZ, J. ALLENDORF, M.D. KEE, R.J. COLTRIN, M.E.

COMPUTATIONAL SIMULATION OF DIAMOND CHEMICAL VAPOR DEPOSITION IN PREMIXED C/SUB 2/H/SUB 2//O/SUB 2//H/SUB 2/ AND CH/SUB 4//O/SUB 2/ STRAINED FLAMES (SAND ; SAND-92-8462C)

COMPUTATIONAL SIMULATION OF DIAMOND CHEMICAL VAPOR DEPOSITION IN PREMIXED C/SUB 2/H/SUB 2//O/SUB 2//H/SUB 2/ AND CH/SUB 4//O/SUB 2/ STRAINED FLAMES (SAND ; SAND-92-8462C)
Paper図書
MEEKS, E.// KEE, R.J.// DANDY, D.S.// COLTRIN, M.E. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1992.
Other Libraries in Japan
  • Author HeadingMEEKS, E. KEE, R.J. DANDY, D.S. COLTRIN, M.E.

CRESLAF (VERSION 4.0): A FORTRAN PROGRAM FOR MODELING LAMINAR, CHEMICALLY REACTING, BOUNDARY-LAYER FLOW IN CYLINDRICAL OR PLANAR CHANNELS (SAND ; SAND-93-0478)

CRESLAF (VERSION 4.0): A FORTRAN PROGRAM FOR MODELING LAMINAR, CHEMICALLY REACTING, BOUNDARY-LAYER FLOW IN CYLINDRICAL OR PLANAR CHANNELS (SAND ; SAND-93-0478)
Paper図書
COLTRIN, M.E.// MOFFAT, H.K.// KEE, R.J.// RUPLEY, F.M. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES)// SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingCOLTRIN, M.E. MOFFAT, H.K. KEE, R.J. RUPLEY...

SURFACE CHEMKIN (VERSION 4.0): A FORTRAN PACKAGE FOR ANALYZING HETEROGENEOUS CHEMICAL KINETICS AT A SOLID-SURFACE-GAS-PHASE INTERFACE (SAND ; SAND-90-8003B)

SURFACE CHEMKIN (VERSION 4.0): A FORTRAN PACKAGE FOR ANALYZING HETEROGENEOUS CHEMICAL KINETICS AT A SOLID-SURFACE-GAS-PHASE INTERFACE (SAND ; SAND-90-8003B)
Paper図書
COLTRIN, M.E.// KEE, R.J.// RUPLEY, F.M. (SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1991.
Other Libraries in Japan
  • Author HeadingCOLTRIN, M.E. KEE, R.J. RUPLEY, F.M.

A mathematical model of the gas-phase and surface chemistry in GaAs MOCVD (SAND ; SAND-88-3049C; CONF-890426-4; DE89010228)

A mathematical model of the gas-phase and surface chemistry in GaAs MOCVD (SAND ; SAND-88-3049C; CONF-890426-4; DE89010228)
Paper図書
Coltrin, M.E., Kee, R.J.Sandia National Labs.1989.1.
Other Libraries in Japan
  • Author HeadingColtrin, M.E. Kee, R.J.

SPIN (VERSION 3.83): A FORTRAN PROGRAM FOR MODELING ONEDIMENSIONAL ROTATING-DISK/STAGNATION-FLOW CHEMICAL VAPOR DEPOSITION REACTORS (SAND ; SAND-91-8003)

SPIN (VERSION 3.83): A FORTRAN PROGRAM FOR MODELING ONEDIMENSIONAL ROTATING-DISK/STAGNATION-FLOW CHEMICAL VAPOR DEPOSITION REACTORS (SAND ; SAND-91-8003)
Paper図書
COLTRIN, M.E.// KEE, R.J.// EVANS, G.H.// MEEKS, E.// RUPLEY, F.M.// GRCAR, J.F. (SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1991.
Other Libraries in Japan
  • Author HeadingCOLTRIN, M.E. KEE, R.J. EVANS, G.H. MEEKS, ...

Mechanisms of silicon CVD (chemical vapor deposition) (SAND ; SAND-87-1341C; CONF-870760-1; DE87010474)

Mechanisms of silicon CVD (chemical vapor deposition) (SAND ; SAND-87-1341C; CONF-870760-1; DE87010474)
Paper図書
Ho, P., Breiland, W.G., Coltrin, M.E.Sandia National Labs.1987.1.
Other Libraries in Japan
  • Author HeadingHo, P. Breiland, W.G. Coltrin, M.E.

SURFACE CHEMKIN (VERSION 3.7): A FORTRAN PACKAGE FOR ANALYZING HETEROGENEOUS CHEMICAL KINETICS AT A SOLID-SURFACE-GAS-PHASE INTERFACE (SAND ; SAND-90-8003)

SURFACE CHEMKIN (VERSION 3.7): A FORTRAN PACKAGE FOR ANALYZING HETEROGENEOUS CHEMICAL KINETICS AT A SOLID-SURFACE-GAS-PHASE INTERFACE (SAND ; SAND-90-8003)
Paper図書
COLTRIN, M.E.// KEE, R.J.// RUPLEY, F.M. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (USA)// SANDIA NATIONAL LABS., LIVERMORE, CA (USA))Sandia National Laboratories(Sandia National Laboratories)1990.
Other Libraries in Japan
  • Author HeadingCOLTRIN, M.E. KEE, R.J. RUPLEY, F.M. SANDIA...

SI DEPOSITION RATES IN A TWO-DIMENSIONAL CVD (CHEMICAL VAPOR DEPOSITION) REACTOR AND COMPARISONS WITH MODEL CALCULATIONS (SAND ; SAND-89-2090)

SI DEPOSITION RATES IN A TWO-DIMENSIONAL CVD (CHEMICAL VAPOR DEPOSITION) REACTOR AND COMPARISONS WITH MODEL CALCULATIONS (SAND ; SAND-89-2090)
Paper図書
BREILAND, W.G.//COLTRIN, M.E. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (USA))Sandia National Laboratories(Sandia National Laboratories)1989.
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  • Author HeadingBREILAND, W.G. COLTRIN, M.E.

Laser diagnostics of silicon chemical vapor deposition: In situ measurements and comparisons with model predictions (SAND ; SAND-87-0619C; CONF-871027-5; DE87008514)

Laser diagnostics of silicon chemical vapor deposition: In situ measurements and comparisons with model predictions (SAND ; SAND-87-0619C; CONF-871027-5; DE87008514)
Paper図書
Breiland, W.G., Ho, P., Coltrin, M.E.Sandia National Labs.1987.1.
Other Libraries in Japan
  • Author HeadingBreiland, W.G. Ho, P. Coltrin, M.E.
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