M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]SPIEc2001
M. Edward Motamedi, Rolf Göering, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA)SPIEc2000