editors, Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied PhysicsNorthern California Chapter of the American Vacuum Societyc1997
Other Libraries in Japan
Author HeadingInternational Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey, Calif.) Cheung, Kin P. Nakamura, Mori...