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Voltage uniformity study in large-area reactors for RF plasma deposition LRP-554/96 DE97 718834

Voltage uniformity study in large-area reactors for RF plasma deposition LRP-554/96 DE97 718834
PaperMicroform規格・テクニカルリポート類
Sansonnens, L, Pletzer, A, Magni, D, Howling, A. A, Hollenstein, C1996<LS-DE97/718834>
National Diet LibraryOther Libraries in Japan

ETUDES DES PLASMAS ORGANOSCILICIES DILUES EN OXYGENE UTILISES POUR LA DEPOSITION D'OXYDE DE SILICIUM (LRP ; LRP-706/01)

ETUDES DES PLASMAS ORGANOSCILICIES DILUES EN OXYGENE UTILISES POUR LA DEPOSITION D'OXYDE DE SILICIUM (LRP ; LRP-706/01)
Paper図書
MAGNI, D.2001.
Other Libraries in Japan
  • Author HeadingMAGNI, D.

OXYGEN DILUTED HEXAMETHYLDISILOXANE PLASMAS INVESTIGATED BY MEANS OF IN SITU INFRARED ABSORPTION SPECTROSCOPY AND MASS SPECTROMETRY (LRP ; LRP-686/00)

OXYGEN DILUTED HEXAMETHYLDISILOXANE PLASMAS INVESTIGATED BY MEANS OF IN SITU INFRARED ABSORPTION SPECTROSCOPY AND MASS SPECTROMETRY (LRP ; LRP-686/00)
Paper図書
MAGNI, D./DESCHENAUX, CH.2000.
Other Libraries in Japan
  • Author HeadingMAGNI, D. DESCHENAUX, CH.

GASPHASE AND PARTICLE DIAGNOSTIC OF HMDSO PLASMAS BY INFRARED ABSORPTION SPECTROSCOPY (LRP ; LRP-627/98)

GASPHASE AND PARTICLE DIAGNOSTIC OF HMDSO PLASMAS BY INFRARED ABSORPTION SPECTROSCOPY (LRP ; LRP-627/98)
Paper図書
COURTEILLE, C./MAGNI, D.1998.
Other Libraries in Japan
  • Author HeadingCOURTEILLE, C. MAGNI, D.

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