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イオン照射によるスパツタ薄膜中の残留応力低減
イオン照射によるスパツタ薄膜中の残留応力低減
Paper
図書
Nowak, Roman
, 広島大学
1998-1999
<Y151-H10650091>
National Diet Library
Author Heading
Nowak, Roman
イオン照射によるスパッタ薄膜中の残留応力低減
イオン照射によるスパッタ薄膜中の残留応力低減
Paper
図書
研究者代表
Nowak Roman
[
Nowak Roman
]
2000.3
Other Libraries in Japan
Note (General)
課題番号: 10650091 研究代表者:
Nowak Roman
(広島大学工学部助教授) 研究分担者: 吉田総仁, 岡田達夫...
Author Heading
Nowak Roman
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