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Thermal metalorganic chemical vapor deposition of Ti-Si-N films for diffusion barrier applications SAND-96-0919C DE96 009176 CONF-9604014

Thermal metalorganic chemical vapor deposition of Ti-Si-N films for diffusion barrier applications SAND-96-0919C DE96 009176 CONF-9604014
Microform規格・テクニカルリポート類
Custer, J. S, Smith, P. M, Jones, R. V, Maverick, A. W, Roberts, D. A1996<LS-DE96/009176>
National Diet Library

THERMAL METALORGANIC CHEMICAL VAPOR DEPOSITION OF TI-SI-N FILMS FOR DIFFUSION BARRIER APPLICATIONS (SAND ; SAND-96-0919C)

THERMAL METALORGANIC CHEMICAL VAPOR DEPOSITION OF TI-SI-N FILMS FOR DIFFUSION BARRIER APPLICATIONS (SAND ; SAND-96-0919C)
Paper図書
CUSTER, J.S.// SMITH, P.M.// JONES, R.V.// MAVERICK, A.W.// ROBERTS, D.A.// NORMAN, J.A.T.// HOCHBERG, A.K. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingCUSTER, J.S. SMITH, P.M. JONES, R.V. MAVERICK, A.W. ROBERTS, D.A. NORMAN, J.A.T. HOCHBERG, A.K.

COPPER CVD USING LIQUID COINJECTION OF (HFAC)CU(TMVS) AND TMVS (SAND ; SAND-94-2544C)

COPPER CVD USING LIQUID COINJECTION OF (HFAC)CU(TMVS) AND TMVS (SAND ; SAND-94-2544C)
Paper図書
CUSTER, J.S.// PETERSEN, G.A.// SMITH, P.M.// PARMETER, J.E.// APBLETT, C.A.// NORMAN, J.A.T.// HOCHBERG, A.K.// ROBERTS, D.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author Heading...HOCHBERG, A.K. ROBERTS, D.A.

CHEMICAL VAPOR DEPOSITION AND CHARACTERIZATION OF TUNGSTEN BORON ALLOY FILMS (SAND ; SAND-93-2445C)

CHEMICAL VAPOR DEPOSITION AND CHARACTERIZATION OF TUNGSTEN BORON ALLOY FILMS (SAND ; SAND-93-2445C)
Paper図書
SMITH, P.M.// FLEMING, J.G.// LUJAN, R.D.// ROHERTY-OSMUN, E.// REID, J.S.// HOCHBERG, A.K.// ROBERTS, D.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingSMITH, P.M. FLEMING, J.G. LUJAN, R.D. ROHERTY-OSMUN, E. REID, J.S. HOCHBERG, A.K. ROBERTS, D.A.

Brassey's international intelligence yearbook 2003 edition : pbk

Brassey's international intelligence yearbook 2003 edition : pbk
Paper図書
Robert D'A. HendersonBrassey'sc2003
Other Libraries in Japan

South Africa and selective economic sanctions : a Canadian perspective

South Africa and selective economic sanctions : a Canadian perspective
Paper図書
Robert d'A HendersonSouth African Institute of International Affairs. Jan Smunts house[1986]
Other Libraries in Japan

Rethinking economic development / by Robert d'A. Shaw. (Development paper)

Rethinking economic development / by Robert d'A. Shaw. (Development paper)
Paper図書
Overseas Development Council1972.<DC631-A136>
National Diet Library

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