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Voltage uniformity study in large-area reactors for RF plasma deposition LRP-554/96 DE97 718834

Voltage uniformity study in large-area reactors for RF plasma deposition LRP-554/96 DE97 718834
PaperMicroform規格・テクニカルリポート類
Sansonnens, L, Pletzer, A, Magni, D, Howling, A. A, Hollenstein, C1996<LS-DE97/718834>
National Diet LibraryOther Libraries in Japan

NON-UNIFORM RF PLASMA POTENTIAL DUE TO EDGE ASYMMETRY IN LARGE-AREA RF REACTORS (LRP ; LRP-788/04)

NON-UNIFORM RF PLASMA POTENTIAL DUE TO EDGE ASYMMETRY IN LARGE-AREA RF REACTORS (LRP ; LRP-788/04)
Paper図書
HOWLING, A.A./SANSONNENS, L.2004.
Other Libraries in Japan
  • Author HeadingHOWLING, A.A. SANSONNENS, L.

ATTACHMENT-INDUCED IONIZATION INSTABILITY IN ELECTRONEGATIVE CAPACITIVE RF DISCHARGES (LRP ; LRP-751/03)

ATTACHMENT-INDUCED IONIZATION INSTABILITY IN ELECTRONEGATIVE CAPACITIVE RF DISCHARGES (LRP ; LRP-751/03)
Paper図書
DESCOEUDRES, A./SANSONNENS, L.2003.
Other Libraries in Japan
  • Author HeadingDESCOEUDRES, A. SANSONNENS, L.

PLASMA UNIFORMITY EXPERIMENTS USING LENS-SHAPED ELECTRODES IN A LARGE AREA VHF REACTOR (LRP ; LRP-773/03)

PLASMA UNIFORMITY EXPERIMENTS USING LENS-SHAPED ELECTRODES IN A LARGE AREA VHF REACTOR (LRP ; LRP-773/03)
Paper図書
SCHMIDT, H./SANSONNENS, L.2003.
Other Libraries in Japan
  • Author HeadingSCHMIDT, H. SANSONNENS, L.

GAS FLOW UNIFORMITY STUDY IN LARGE-AREA SHOWERHEAD REACTORS FOR RF PLASMA DEPOSITION (LRP ; LRP-642/99)

GAS FLOW UNIFORMITY STUDY IN LARGE-AREA SHOWERHEAD REACTORS FOR RF PLASMA DEPOSITION (LRP ; LRP-642/99)
Paper図書
SANSONNENS, L./HOWLING, A.A.1999.
Other Libraries in Japan
  • Author HeadingSANSONNENS, L. HOWLING, A.A.

DEPOSITION ASSISTEE PAR PLASMA RADIOFREQUENCE DANS UN REACTEUR DE GRANDE SURFACE: EFFETS DE LA CONTAMINATION_ (LRP ; LRP-602/98)

DEPOSITION ASSISTEE PAR PLASMA RADIOFREQUENCE DANS UN REACTEUR DE GRANDE SURFACE: EFFETS DE LA CONTAMINATION_ (LRP ; LRP-602/98)
Paper図書
SANSONNENS, L.1998.
Other Libraries in Japan
  • Author HeadingSANSONNENS, L.

ROLE OF METASTABLE ATOMS IN ARGON-DILUTED SILANE RF PLASMAS. (LRP ; LRP-490/94)

ROLE OF METASTABLE ATOMS IN ARGON-DILUTED SILANE RF PLASMAS. (LRP ; LRP-490/94)
Paper図書
SANSONNENS, L.(et al.)1994.
Other Libraries in Japan
  • Author HeadingSANSONNENS, L.

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