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In situ analysis of thin film deposition processes using time-of-flight (TOF) ion beam analysis methods ANL/CHM/CP-85678 DE95 013546 CONF-95051223

In situ analysis of thin film deposition processes using time-of-flight (TOF) ion beam analysis methods ANL/CHM/CP-85678 DE95 013546 CONF-95051223
Microform規格・テクニカルリポート類
Im, J, Krauss, A. R, Gruen, D. M, Lin, Y, Schultz, J. A1995<LS-DE95/013546>
National Diet Library

IN SITU ANALYSIS OF THIN FILM DEPOSITION PROCESSES USING TIME-OF-FLIGHT (TOF) ION BEAM ANALYSIS METHODS (ANL ; ANL/CHM/CP-85678)

IN SITU ANALYSIS OF THIN FILM DEPOSITION PROCESSES USING TIME-OF-FLIGHT (TOF) ION BEAM ANALYSIS METHODS (ANL ; ANL/CHM/CP-85678)
Paper図書
IM, J.// KRAUSS, A.R.// GRUEN, D.M.// LIN, Y.// SCHULTZ, J.A.// AUCIELLO, O.H. (ARGONNE NATIONAL LAB., IL (UNITED STATES))Argonne National Laboratory(Argonne National Laboratory)1995.
Other Libraries in Japan
  • Author HeadingIM, J. KRAUSS, A.R. GRUEN, D.M. LIN, Y. SCHULTZ, J.A. AUCIELLO, O.H.

PULSED ION BEAM METHODS FOR IN SITU CHARACTERIZATION OF DIAMOND FILM DEPOSITION PROCESSES (ANL ; ANL/CHM/CP-84380)

PULSED ION BEAM METHODS FOR IN SITU CHARACTERIZATION OF DIAMOND FILM DEPOSITION PROCESSES (ANL ; ANL/CHM/CP-84380)
Paper図書
KRAUSS, A.R.// SMENTKOWSKI, V.S.// ZUIKER, C.D.// GRUEN, D.M.// IM, J.// SCHULTZ, J.A.// WATERS, K.// CHANG, R.P.H. (ARGONNE NATIONAL LAB., IL (UNITED STATES))Argonne National Laboratory(Argonne National Laboratory)1995.
Other Libraries in Japan
  • Author Heading...N, D.M. IM, J. SCHULTZ, J.A. WATERS, K. CHANG, R.P.H.

ATMOSPHERE INFLUENCE ON IN SITU ION BEAM ANALYSIS OF THIN FILM GROWTH (ANL ; ANL/CHM/CP-81118)

ATMOSPHERE INFLUENCE ON IN SITU ION BEAM ANALYSIS OF THIN FILM GROWTH (ANL ; ANL/CHM/CP-81118)
Paper図書
LIN, YUPING// KRAUSS, A.R.// GRUEN, D.M.// CHANG, R.P.H.// AUCIELLO, O.H.// SCHULTZ, J.A. (ARGONNE NATIONAL LAB., IL (UNITED STATES))Argonne National Laboratory(Argonne National Laboratory)1994.
Other Libraries in Japan
  • Author HeadingLIN, YUPING KRAUSS, A.R. GRUEN, D.M. CHANG, R.P.H. AUCIELLO, O.H. SCHULTZ, J.A.

PULSED ION BEAM SURFACE ANALYSIS (PIBSA) AS A MEANS OF IN-SITU REALTIME ANALYSIS OF THIN FILMS DURING GROWTH (ANL ; ANL/CHM/CP-80915)

PULSED ION BEAM SURFACE ANALYSIS (PIBSA) AS A MEANS OF IN-SITU REALTIME ANALYSIS OF THIN FILMS DURING GROWTH (ANL ; ANL/CHM/CP-80915)
Paper図書
KRAUSS, A.R.// LAMICH, G.J.// GRUEN, D.M.// LIN, Y.// CHANG, R.P.H.// AUCIELLO, O.// SCHULTZ, J.A. (ARGONNE NATIONAL LAB., IL (UNITED STATES))Argonne National Laboratory(Argonne National Laboratory)1993.
Other Libraries in Japan
  • Author HeadingKRAUSS, A.R. LAMICH, G.J. GRUEN, D.M. LIN, Y. CHANG, R.P.H. AUCIELLO, O. SCHULTZ, J.A.

ION BEAM-BASED CHARACTERIZATION OF MULTICOMPONENT OXIDE THIN FILMS AND THIN FILM LAYERED STRUCTURES (ANL ; ANL/CHM/CP-73956)

ION BEAM-BASED CHARACTERIZATION OF MULTICOMPONENT OXIDE THIN FILMS AND THIN FILM LAYERED STRUCTURES (ANL ; ANL/CHM/CP-73956)
Paper図書
KRAUSS, A.R.// RANGASWAMY, M.// LIN, YUPING// GRUEN, D.M.// SCHULTZ, J.A.// SCHMIDT, H.K.// CHANG, R.P.H. (ARGONNE NATIONAL LAB., IL (UNITED STATES))Argonne National Laboratory(Argonne National Laboratory)1992.
Other Libraries in Japan
  • Author HeadingKRAUSS, A.R. RANGASWAMY, M. LIN, YUPING GRUEN, D.M. SCHULTZ, J.A. SCHMIDT, H.K. CHANG, R.P.H.

ION BEAMS AS A MEANS OF DEPOSITION AND IN-SITU CHARACTERIZATION OF THIN FILMS AND THIN FILM LAYERED STRUCTURES (ANL ; ANL/CP-76359)

ION BEAMS AS A MEANS OF DEPOSITION AND IN-SITU CHARACTERIZATION OF THIN FILMS AND THIN FILM LAYERED STRUCTURES (ANL ; ANL/CP-76359)
Paper図書
KRAUSS, A.R.// RANGASWAMY, M.// GRUEN, D.M.// LIN, Y.P.// SCHULTZ, J.A.// SCHMIDT, H.// LIU, Y.L. (ARGONNE NATIONAL LAB., IL (UNITED STATES))Argonne National Laboratory(Argonne National Laboratory)1992.
Other Libraries in Japan
  • Author HeadingKRAUSS, A.R. RANGASWAMY, M. GRUEN, D.M. LIN, Y.P. SCHULTZ, J.A. SCHMIDT, H. LIU, Y.L.

ION BEAM SPECTROSCOPY AS A MEANS OF IN-SITU MONITORING OF THIN FILM DEPOSITION (ANL ; ANL/CP-75799)

ION BEAM SPECTROSCOPY AS A MEANS OF IN-SITU MONITORING OF THIN FILM DEPOSITION (ANL ; ANL/CP-75799)
Paper図書
KRAUSS, A.R.// RANGASWAMY, M.// LAMICH, G.// GRUEN, D.M.// SCHULTZ, J.A.// SCHMIDT, H. (ARGONNE NATIONAL LAB., IL (UNITED STATES))Argonne National Laboratory(Argonne National Laboratory)1992.
Other Libraries in Japan
  • Author HeadingKRAUSS, A.R. RANGASWAMY, M. LAMICH, G. GRUEN, D.M. SCHULTZ, J.A. SCHMIDT, H.

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