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Extreme Ultraviolet Lithography with laser plasma sources SAND-95-8550C DE95 010753 CONF-95071222

Extreme Ultraviolet Lithography with laser plasma sources SAND-95-8550C DE95 010753 CONF-95071222
Microform規格・テクニカルリポート類
Kubiak, G. D, Tichenor, D. A, Stulen, R. H1995<LS-DE95/010753>
National Diet Library

Large-solid-angle illuminators for extreme ultraviolet lithography with laser plasmas SAND-95-8229 DE95 014992

Large-solid-angle illuminators for extreme ultraviolet lithography with laser plasmas SAND-95-8229 DE95 014992
Microform規格・テクニカルリポート類
Kubiak, G. D, Tichenor, D. A, Sweatt, W. C, Chow, W. W1995<LS-DE95/014992>
National Diet Library

Characterization of an expanded-field Schwarzschild objective for extreme ultraviolet lithography SAND-94-8619C DE94 016780 CONF-94062311

Characterization of an expanded-field Schwarzschild objective for extreme ultraviolet lithography SAND-94-8619C DE94 016780 CONF-94062311
Microform規格・テクニカルリポート類
Kubiak, G. D, Tichenor, D. A, Ray-Chaudhuri, A. K1994<LS-DE94/016780>
National Diet Library

Recent results in the devleopment of an integrated EUVL laboratory tool SAND-94-8779C DE95 010756 CONF-95022648

Recent results in the devleopment of an integrated EUVL laboratory tool SAND-94-8779C DE95 010756 CONF-95022648
Microform規格・テクニカルリポート類
Tichenor, D. A, Kubiak, G. D, Haney, S. J1994<LS-DE95/010756>
National Diet Library

10(times) reduction imaging at 13.4nm SAND-94-8602C DE94 016612 CONF-94091772

10(times) reduction imaging at 13.4nm SAND-94-8602C DE94 016612 CONF-94091772
Microform規格・テクニカルリポート類
Tichenor, D. A, Kubiak, G. D, Malinowski, M. E1994<LS-DE94/016612>
National Diet Library

Printability of substrate and absorber defects on extreme ultraviolet lithographic masks SAND-95-8554C DE95 010916 CONF-95022647

Printability of substrate and absorber defects on extreme ultraviolet lithographic masks SAND-95-8554C DE95 010916 CONF-95022647
Microform規格・テクニカルリポート類
Nguyen, K. B, Ray-Chaudhuri, A. K, Tichenor, D. A, Stulen, R. H, Nissen, R. P1995<LS-DE95/010916>
National Diet Library

EXTREME ULTRAVIOLET LITHOGRAPHY WITH LASER PLASMA SOURCES (SAND ; SAND-95-8550C)

EXTREME ULTRAVIOLET LITHOGRAPHY WITH LASER PLASMA SOURCES (SAND ; SAND-95-8550C)
Paper図書
KUBIAK, G.D.// TICHENOR, D.A.// STULEN, R.H. (SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingKUBIAK, G.D. TICHENOR, D.A. STULEN, R.H.

SURFACE CHARACTERIZATION OF OPTICS FOR EUV LITHOGRAPHY (UCRL ; UCRL-JC-123042)

SURFACE CHARACTERIZATION OF OPTICS FOR EUV LITHOGRAPHY (UCRL ; UCRL-JC-123042)
Paper図書
GAINES, D.P.// SWEENEY, D.W.// DELONG, K.W.// VERNON, S.P.// BAKER, S.L.// TICHENOR, D.A.// KESTNER, R. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1996.
Other Libraries in Japan
  • Author HeadingGAINES, D.P. SWEENEY, D.W. DELONG, K.W. VERNON, S.P. BAKER, S.L. TICHENOR, D.A. KESTNER, R.

10X REDUCTION IMAGING AT 13.4NM (SAND ; SAND-94-8602C)

10X REDUCTION IMAGING AT 13.4NM (SAND ; SAND-94-8602C)
Paper図書
TICHENOR, D.A.// KUBIAK, G.D.// MALINOWSKI, M.E. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingTICHENOR, D.A. KUBIAK, G.D. MALINOWSKI, M.E.

LARGE-SOLID-ANGLE ILLUMINATORS FOR EXTREME ULTRAVIOLET LITHOGRAPHY WITH LASER PLASMAS (SAND ; SAND-95-8229)

LARGE-SOLID-ANGLE ILLUMINATORS FOR EXTREME ULTRAVIOLET LITHOGRAPHY WITH LASER PLASMAS (SAND ; SAND-95-8229)
Paper図書
KUBIAK, G.D.// TICHENOR, D.A.// SWEATT, W.C.// CHOW, W.W. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingKUBIAK, G.D. TICHENOR, D.A. SWEATT, W.C. CHOW, W.W.

RECENT RESULTS IN THE DEVLEOPMENT OF AN INTEGRATED EUVL LABORATORY TOOL (SAND ; SAND-94-8779C)

RECENT RESULTS IN THE DEVLEOPMENT OF AN INTEGRATED EUVL LABORATORY TOOL (SAND ; SAND-94-8779C)
Paper図書
TICHENOR, D.A.// KUBIAK, G.D.// HANEY, S.J. (SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingTICHENOR, D.A. KUBIAK, G.D. HANEY, S.J.

CHARACTERIZATION OF AN EXPANDED-FIELD SCHWARZSCHILD OBJECTIVE FOR EXTREME ULTRAVIOLET LITHOGRAPHY (SAND ; SAND-94-8619C)

CHARACTERIZATION OF AN EXPANDED-FIELD SCHWARZSCHILD OBJECTIVE FOR EXTREME ULTRAVIOLET LITHOGRAPHY (SAND ; SAND-94-8619C)
Paper図書
KUBIAK, G.D.// TICHENOR, D.A.// RAYCHAUDHURI, A.K.(SANDIA NATIONAL LABS., LIVERMORE,CA(UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingKUBIAK, G.D. TICHENOR, D.A. RAYCHAUDHURI, A.K.

MASS-PRODUCIBLE MICRO-HOLOGRAPHIC TAGS (SAND ; SAND-96-1240C)

MASS-PRODUCIBLE MICRO-HOLOGRAPHIC TAGS (SAND ; SAND-96-1240C)
Paper図書
SWEATT, W.C.// RAY-CHAUDHURI, A.K.// KRAVITZ, S.H.// WARREN, M.E.// STULEN, R.H.// TICHENOR, D.A.// KRENZ, K.D.// DESCOUR, M.R.// UNDERWOOD, J.H. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES)// SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author Heading.... STULEN, R.H. TICHENOR, D.A. KRENZ, K.D. DESCOUR, M.R. UND...

RESIST PERFORMANCE IN SOFT X-RAY PROJECTION LITHOGRAPHY (SAND ; SAND-93-8541C)

RESIST PERFORMANCE IN SOFT X-RAY PROJECTION LITHOGRAPHY (SAND ; SAND-93-8541C)
Paper図書
KUBIAK, G.D.// TICHENOR,D.A.// CHOW, W.W.// SWEATT, W.C.// HIMEL, M.D. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan

PRINTABILITY OF SUBSTRATE AND ABSORBER DEFECTS ON EXTREME ULTRAVIOLET LITHOGRAPHIC MASKS (SAND ; SAND-95-8554C)

PRINTABILITY OF SUBSTRATE AND ABSORBER DEFECTS ON EXTREME ULTRAVIOLET LITHOGRAPHIC MASKS (SAND ; SAND-95-8554C)
Paper図書
NGUYEN, K.B.// RAY-CHAUDHURI, A.K.// TICHENOR, D.A.// STULEN, R.H.// NISSEN, R.P.// BERGER, K.W.// PAUL, P.H.// TENNANT, D.M.// FETTER, L.A.// WINDT, D.L. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author Heading...HAUDHURI, A.K. TICHENOR, D.A. STULEN, R.H. NISSEN, R.P. BER...

DEVELOPMENT OF A LABORATORY EXTREME-ULTRAVIOLET LITHOGRAPHY TOOL (SAND ; SAND-93-8663C)

DEVELOPMENT OF A LABORATORY EXTREME-ULTRAVIOLET LITHOGRAPHY TOOL (SAND ; SAND-93-8663C)
Paper図書
TICHENOR, D.A.// KUBIAK, G.D.// MALINOWSKI, M.E.// STULEN, R.H.// HANEY, S.J.// BERGER, K.W.// NISSEN, R.P.// WILKERSON, G.A.// PAUL, P.H.// BIRTOLA, S.R. (SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingTICHENOR, D.A. KUBIAK, G.D. MALINOWSKI, M.E....

SANDIA NATIONAL LABORATORIES HIGH FLUX NEUTRON RADIOGRAPHY FACILITY IMAGE CHARACTERIZATION (SAND ; SAND-91-2697C)

SANDIA NATIONAL LABORATORIES HIGH FLUX NEUTRON RADIOGRAPHY FACILITY IMAGE CHARACTERIZATION (SAND ; SAND-91-2697C)
Paper図書
MCCRORY, F.M.// KELLY, J.G.// TICHENOR, D.A.// VER BERKMOES, A.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1991.
Other Libraries in Japan
  • Author HeadingMCCRORY, F.M. KELLY, J.G. TICHENOR, D.A. VER BERKMOES, A.A.

Neutral particle beam scoring system proof-of-principle experiment (Sandia report ; SAND-86-8927; DE87001665)

Neutral particle beam scoring system proof-of-principle experiment (Sandia report ; SAND-86-8927; DE87001665)
Paper図書
Tichenor, D.A., Pontau, A.E., Antolak, A.J.Sandia National Labs.1986.10.
Other Libraries in Japan
  • Author HeadingTichenor, D.A. Pontau, A.E. Antolak, A.J.

SIMULTANEOUS IN SITU MEASUREMENT OF THE SIZE. (SAND ; SAND-84-8628)

SIMULTANEOUS IN SITU MEASUREMENT OF THE SIZE. (SAND ; SAND-84-8628)
Paper図書
TICHENOR, D.A.(et al.)Sandia Labs., Albuquerque, N.Mex. (USA)(Sandia Labs., Albuquerque, N.Mex. (USA))1984.
Other Libraries in Japan
  • Author HeadingTICHENOR, D.A.

ASSESSMENT OF DIAGNOSTICS FOR THE STUDY OF THE DISASSEMBLY OF ISOCHORICALLY HEATED LIQUIDS. (SAND ; SAND-83-8238)

ASSESSMENT OF DIAGNOSTICS FOR THE STUDY OF THE DISASSEMBLY OF ISOCHORICALLY HEATED LIQUIDS. (SAND ; SAND-83-8238)
Paper図書
TICHENOR, D.A.Sandia National Laboratories(Sandia National Laboratories)1983.
Other Libraries in Japan
  • Author HeadingTICHENOR, D.A.
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