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Role of implantation damage in the production of silicon-on- insulator films by co-Implantation of He(sup +) and H(sup +) ORNLCP96086 DE98 004113 CONF980528

Role of implantation damage in the production of silicon-on- insulator films by co-Implantation of He(sup +) and H(sup +) ORNLCP96086 DE98 004113 CONF980528
Microform規格・テクニカルリポート類
Venezia, V. C, Agarwal, A, Haynes, T. E, Holland, O. W, Eaglesham, D. J1998<LS-DE98/004113>
National Diet Library

Vacancy supersaturations produced by high-energy ion implantation ORNLCP96088 DE98 004112 CONF980528

Vacancy supersaturations produced by high-energy ion implantation ORNLCP96088 DE98 004112 CONF980528
Microform規格・テクニカルリポート類
Venezia, V. C, Eaglesham, D. J, Jacobson, D. C, Gossmann, H. J, Haynes, T. E1998<LS-DE98/004112>
National Diet Library

Enhanced diffusion of dopants in vacancy supersaturation produced by MeV implantation CONF-970302-6 DE97 006058

Enhanced diffusion of dopants in vacancy supersaturation produced by MeV implantation CONF-970302-6 DE97 006058
PaperMicroform規格・テクニカルリポート類
Venezia, V. C, Haynes, T. E, Agarwal, A, Gossmann, H. J, Eaglesham, D. J1997<LS-DE97/006058>
National Diet LibraryOther Libraries in Japan

ROLE OF IMPLANTATION DAMAGE IN THE PRODUCTION OF SILICON-ON- INSULATOR FILMS BY CO-IMPLANTATION OF HE(SUP +) AND H(SUP +) (ORNL ; ORNL/CP-96086; DE98004113)

ROLE OF IMPLANTATION DAMAGE IN THE PRODUCTION OF SILICON-ON- INSULATOR FILMS BY CO-IMPLANTATION OF HE(SUP +) AND H(SUP +) (ORNL ; ORNL/CP-96086; DE98004113)
Paper図書
VENEZIA, V.C.(et al.)Oak Ridge National Laboratory(Oak Ridge National Laboratory)1998.
Other Libraries in Japan
  • Author HeadingVENEZIA, V.C.

VACANCY SUPERSATURATIONS PRODUCED BY HIGH-ENERGY ION IMPLANTATION. (ORNL ; ORNL/CP-96088; DE98004112)

VACANCY SUPERSATURATIONS PRODUCED BY HIGH-ENERGY ION IMPLANTATION. (ORNL ; ORNL/CP-96088; DE98004112)
Paper図書
VENEZIA, V.C.(et al.)Oak Ridge National Laboratory(Oak Ridge National Laboratory)1998.
Other Libraries in Japan
  • Author HeadingVENEZIA, V.C.

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