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マイクロ波プラズマ高品質ゲート絶縁膜を用いた超高耐圧SiC電力用トランジスタ
マイクロ波プラズマ高品質ゲート絶縁膜を用いた超高耐圧SiC電力用トランジスタ
Paper
図書
寺本章伸, 東北大学 [著]
[寺本章伸]
2003-2004
<Y151-H15360156>
National Diet Library
MOSLSI用ゲート酸化膜の信頼性と製造プロセス
MOSLSI用ゲート酸化膜の信頼性と製造プロセス
Paper
博士論文
寺本章伸 [著]
[寺本章伸]
[2001]
<UT51-2002-M237>
National Diet Library
マイクロ波プラズマ高品質ゲート絶縁膜を用いた超高耐圧SiC電力用トランジスタ
マイクロ波プラズマ高品質ゲート絶縁膜を用いた超高耐圧SiC電力用トランジスタ
Paper
図書
寺本章伸研究代表
[寺本章伸]
2005.3
Other Libraries in Japan
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