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低損傷マスクレス3次元微細加工技術の開発
低損傷マスクレス3次元微細加工技術の開発
Paper
図書
蒲生, 健次, 大阪大学
1991-1992
<Y151-H03555003>
National Diet Library
Subject Heading
集束イオンビーム加工 低損傷プロセス 低エネルギーイオンビーム 減速電界レンズ系
イオンビーム支援エツチング
イオン照射損傷
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