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イオンビーム誘起エピタキシヤル結晶化による絶縁物上シリコンエピタキシヤル成長
イオンビーム誘起エピタキシヤル結晶化による絶縁物上シリコンエピタキシヤル成長
Paper
図書
山本, 康博, 法政大学
1998-2000
<Y151-H10450012>
National Diet Library
Subject Heading
ヘテロエピタキシ CeO2 SiGe SOI
イオンビーム誘起結晶化
アモルフアスシリコン IBIEC 界面反応
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