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走査型非接触過渡容量分光法の開発及び極薄酸化膜-シリコン界面特性の評価
走査型非接触過渡容量分光法の開発及び極薄酸化膜-シリコン界面特性の評価
Paper
図書
吉田, 晴彦, 姫路工業大学
2001-2002
<Y151-H13450014>
National Diet Library
Subject Heading
非接触評価 局在凖位 ライフタイム 容量-電圧特性 過渡容量分光法
ウエ-ハマツピング
走査型容量顕微鏡 SOI
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