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赤外線表面波光および導波光による半導体エピタクシヤル膜の評価
赤外線表面波光および導波光による半導体エピタクシヤル膜の評価
Paper
図書
小川, 智哉, 学習院大学
1988-1989
<Y151-S63460059>
National Diet Library
Subject Heading
半導体
エピタクシヤル成長膜
イオン注入 光散乱 格子欠陥 ウエハーの評価
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