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フオトルミネセンス法によるシリカ薄膜中の欠陥の検出ならびに構造解析
フオトルミネセンス法によるシリカ薄膜中の欠陥の検出ならびに構造解析
Paper
図書
大木, 義路, 早稲田大学
1997-1999
<Y151-H09450132>
National Diet Library
Subject Heading
シリカ シリコン熱酸化膜 フオトルミネセンス 点欠陥
シリコン埋め込み酸化膜
フツ素添加SiO2 シリコン窒化膜
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