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その場観察用X線光電子分光分析器の開発とシリコン酸化・窒化極薄膜の形成機構の解明
その場観察用X線光電子分光分析器の開発とシリコン酸化・窒化極薄膜の形成機構の解明
Paper
図書
服部, 健雄, 武蔵工業大学
1989-1991
<Y151-H01065003>
National Diet Library
Subject Heading
X線光電子分光法 角度分解X線光電子分光法 赤外全反射吸収測定法 シリコン表面の清浄化
シリコン自然酸化膜
シリコンの初期酸化 シリコン酸化膜/シリコン界面 シリコン...
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