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水素終端シリコン表面の原子層酸化の機構と界面構造
水素終端シリコン表面の原子層酸化の機構と界面構造
Paper
図書
広瀬, 全孝, 広島大学
1992-1993
<Y151-H04452177>
National Diet Library
Subject Heading
シリコン表面 表面マイクロラフネス 水素終端表面 原子
ステツプ構造
原子層酸化 SiO2/Si界面 FT-IR-ATR AFM
微小傾角基板を用いた単一電子トンネル・デバイスの研究
微小傾角基板を用いた単一電子トンネル・デバイスの研究
Paper
図書
菅野, 卓雄, 東洋大学
1993-1995
<Y151-H05452200>
National Diet Library
Subject Heading
高精度微小傾角基板
ステツプ構造
異方性エツチング 表面反転層 単電子トランジスタ 量子ドツ...
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