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デジタルMOCVD法によるPZT強誘電体薄膜の作製とそのデバイス応用に関する研究
デジタルMOCVD法によるPZT強誘電体薄膜の作製とそのデバイス応用に関する研究
Paper
図書
黒岩, 紘一, 東京農工大学
1995-1997
<Y151-H07555418>
National Diet Library
Subject Heading
強誘電体薄膜 不揮発性メモリ PZT ペロブスカイト型結晶
デジタルCVD
高速・高均一
デジタルCVD
を用いたULSI用高機能性薄膜の作製
高速・高均一デジタルCVDを用いたULSI用高機能性薄膜の作製
Paper
図書
堀池靖浩, 東洋大学
1995-1995
<Y151-H05555089>
National Diet Library
Subject Heading
デジタルCVD
ULSI 高機能性薄膜 積層層間絶縁膜 コンフオーマルCV...
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