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変調操作を用いた非定常状態の積極利用によるULSI積層配線作製プロセスの高度化
変調操作を用いた非定常状態の積極利用によるULSI積層配線作製プロセスの高度化
Paper
図書
霜垣, 幸浩, 東京大学
1999-2000
<Y151-H11450269>
National Diet Library
Subject Heading
CVD
バリアメタル
変調操作 核発生 薄膜成長 結晶化 不純物制御 比抵抗
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