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放電重畳法を適用したNOx低減リアクタの開発に関する研究
放電重畳法を適用したNOx低減リアクタの開発に関する研究
Paper
図書
伊藤, 泰郎, 武蔵工業大学
1994-1996
<Y151-H06558087>
National Diet Library
Subject Heading
プラズマリアクタ
NOx 放電分解 放電重畳
高密度VHFプラズマによる薄膜堆積と質量分析、発光時空分光、赤外分光、同時診断
高密度VHFプラズマによる薄膜堆積と質量分析、発光時空分光、赤外分光、同時診断
Paper
図書
伊藤, 秀範, 室蘭工業大学
1999-2001
<Y151-H11450116>
National Diet Library
Subject Heading
高密度プラズマ 発光分光 質量分析 FT-IR 有機シリコン
プラズマリアクタ
薄膜堆積 プラズマCVD
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