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メサ側面再結合電流抑制による極微細GaInAs/InP HBTの超高速化
メサ側面再結合電流抑制による極微細GaInAs/InP HBTの超高速化
Paper
図書
宮本, 恭幸, 東京工業大学
1999-2001
<Y151-H11555092>
National Diet Library
Subject Heading
GaInAs/InP HBT ヘテロ接合バイポーラトランジスタ エミツタ微細化 電子ビーム露光 アンダーカツトエツチング抑制
メサ側面形成
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