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量子化イオン照射による半導体ナノ構造の加工と特性制御
量子化イオン照射による半導体ナノ構造の加工と特性制御
Paper
図書
大泊, 巌, 早稲田大学
1997-1999
<Y151-H09555102>
National Diet Library
Subject Heading
量子化イオン照射法 単一イオン抽出 2次電子検出
不純物揺らぎ
ドーパント個数制御 SIMOX基板 表面改質 異方性エツチ...
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